Active Vibration Isolation Systems

Modern technologies, e.g. in the field of high-resolution measurement, high-precision manufacturing processes and super lightweight construction, require effective anti-vibration solutions to achieve maximum performance. This is particularly true for experiments or processes where the typical amplitudes of the ambient vibration and the dimensions of the investigated or manufactured structures fall in the same range, e.g. submicron semiconductor production, interferometry, confocal optical imaging and scanning probe microscopy.

Passive isolation systems based on pneumatic springs have been used successfully for many years but have problems with low frequency vibrations (0.5-8Hz) where mechanical resonances cause amplifcation of the vibration rather than cancellation.

Halcyonics active isolation systems use sensitive electromechanical sensors to detect vibrations in all 6 axes. These are instantaneously counteracted by electrodynamic actuators to produce an isolated surface from 0.6Hz to infinity.

With a simple set-up procedure and user friendly software the sensors on the Halcyonics systems can be used to determine the best position in a laboratory to locate themselves which eliminates the need for expensive site surveys.

Halcyonics systems are available in the following standard configurations which, in most cases, can be modified to suit the particular application.

NEW Micro 40 & 60 Benchtop Units

Benchtop systems, such as the Halcyonics Micro 40 and 60 [pdf], are the basis for compact scientific applications that require effective vibration isolation. Micro 40 and 60 vibration isolation systems optimally isolate equipment that is extremely sensitive to vibration, such as small interferometers, AFM, SPM, SNOM, advanced equipment for cell biology and other high-resolution measuring instruments, from building vibration and other effects caused by vibration.

Isolation starts at 0.6Hz and is effective in all 6 axes, giving 40dB above 10Hz.

Active Workstation 780 & 900

The new Active Workstation [pdf] comes in two sizes - 780x600mm and 900x750mm and offers the new Vario isolators packaged into an ergonomic workstation format.

With a fully welded construction for optimum stiffness the Workstations offer an ideal platform for Scanning Probe Microscopy, Patch Clamping, Optical Interferometry and other vibration sensitive applications.

NEW Microscopy Workstation

Halcyonics’ Microscopy Workstation [pdf] continues the development of their Active Workstation concept. It now offers a compact active isolated surface especially for optical microscopes, surrounded by a conventional non-isolated laboratory desk surface. On the non-isolated surface users can place other equipment, can handle test samples or can simply write things down.

The active isolated surface has been designed to be big enough to carry large inverted research microscopes - ideal for users in life and materials sciences. For those users who need acoustic isolation as well the Microscopy Workstations can be used together with Halcyonics’ acoustic enclosures - see below

Acoustic Workstation/Enclosures

Unlike the acoustic enclosures available so far, the entire front part of the new Halcyonics enclosure can be effortlessly lifted by the gas pressure actuated mechanism. This provides optimal access to the interior of the equipment setup. Microscopes, one of the equipment setup options, can thus be easily accessed at an angle from either side. Halcyonics' enclosures consist of a multi-layer wall construction for optimal broadband damping of acoustic noise. The walls are inclined at 4° degrees, thereby effectively preventing sound waves from spreading.

The new 600 enclosure has been designed as a smaller alternative to the Acoustic Enclosure 780. Ideal for equipment that is sensitive to airborne noise, such as scanning probe microscopes, smaller systems for error identification in semiconductor wafers and other smaller high-resolution measuring instruments.

Acoustic Enclosures 780 and 900 Datasheet [pdf]

Acoustic Enclosure 600 [pdf]

NEW Vario Basic Series

The new Vario Basic series has replaced the well known Halcyonics MOD-2 system. It has especially been designed as a cost-effective isolation system for applications with high static load and only slight load changes during the operation. This isolation system needs to be manually adjusted prior to use. Later on, there is no further tuning or adjusting required.

Datasheet [pdf]

Vario 45 & Vario 60 Modular Elements

Modular design to meet different loads and tabletop requirements.

Isolation - Active - 1.0 - 200Hz, Passive 200Hz to infinity.

Elements [pdf] can be stacked to meet load requirements.

Compact & lightweight compared to passive systems.

USB interface & automatic load adjustment.

MOD SW Platforms

For active vibration of midsize applications [pdf] such as SEM's.

Isolation - Active - 1.0 - 200Hz, Passive 200Hz to infinity.

Extremely compact - only 130mm high.

Up to 1350kg load with MOD standard dimensions (980 x 774 x 130).

Customised dimensions on request.

DUO 73

Halcyonics Duo 73 has been engineered as a modular system to meet the needs of the most diverse applications. Duo 73 systems can be used in conjunction with steel honeycomb-structured table tops, and, using the available adapter plates, can alternatively be installed directly below the frame of many SEMs (e.g., Carl Zeiss Supra). The basic configuration of the Duo 73 consists of two elements; combinations of 3, 4 or more elements can be readily implemented.

Each Duo module has the controller built in and the particular geometry of the system means that it can be installed in applications where a MOD- Sandwich would be difficult to implement. For further information please see the datasheet.

Custom Solutions

Halcyonics have many years of experience developing custom solutions for OEM's or demanding applications where standard products simply couldn't be used 

The picture opposite shows an active vibration isolation system on a special underframe for a heavy ultra-high-vacuum scanning tunnelling microscope.

Halcyonics designed a solution for the application requiring that the table support a weight ranging up to 900 kg, yet feature exceptionally compact outer dimensions.

Mechanical Isolation Platforms & Tables for Microscopy Applications

Vistek Vibration Isolation Bearings (VIB's) are mechanical bearings requiring no air hoses, maintenance or supporting hardware. Available in specific footprints to suit individual microscopes for desktop use and as tables, the range offers superior performance to air tables particularly in the horizontal plane. Vistek isolators offer the most cost effective and compact solution available for the isolation of individual optical microscopes.

The following product ranges are available:

Vibration Isolation Bearings

Vibration Isolation Tables

Vibration Isolation Platform

 

NEW VIP 275 Series Laboratory Isolation Platforms

Designed specifically for lab balances, countertop shakers, Petri dishes, and other small lab equipment the LIP 275 platforms are lightweight and easy to set up and reduce transmission of vibrations both to and from these instruments

Vistek lab isolation platform - series 275